four probe method meaning in Chinese

四探极法
四探针法

On the other hand , to research the in - diffusion behavior of nitrogen and oxygen into silicon during high temperature rtp , the cz silicon and fz silicon were used respectively . cz silicon and fz silicon preannealed by high temperature rtp in different atmosphere ( n2 , o2 , ar ) were treated at range of 550 ~ 1050 ? for one hour to detect the change in resistivity by four probe method
为了研究氧、氮杂质在高温rtp处理中向硅片内部的扩散行为，实验选用cz硅和fz硅在不同气氛下( n _ 2 , o _ 2 , ar )进行高温rtp预处理，随后在550 1050范围内进行1个小时的热处理，观察硅片电学性能的变化。